Tsuneo Takashima
9Patents
6h-index
10Co-inventors
56Inventor score
Filing activity: Jan 17, 1995 → Aug 31, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5596366A | Camera apparatus having camera movement detection | Electricity | 73 | Expired |
| US6266133A | Stage device, an exposure apparatus and a device manufacturing method using the same | Physics | 49 | Expired |
| US6583859B2 | Stage device, an exposure apparatus and a device manufacturing method using the same | Physics | 18 | Expired |
| US6151100A | Positioning system | Physics | 15 | Expired |
| US5825545A | Image stabilizing device | Physics | 8 | Expired |
| US7084538B2 | Bearing assembly, stage device using same, and exposure apparatus using same | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US6965426B2 | Positioning system and exposure apparatus having the same | Physics | 3 | Expired |
| US7262524B2 | Bearing assembly, stage device using same, and exposure apparatus using same | Mechanical Engineering; Lighting; Heating | 1 | Expired |
| US5483376A | Optical apparatus | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.