Compact pulse stretcher
US7084959B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 27, 2004 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Oct 5, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B27/72
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pulse stretcher includes a first prism and a second prism positioned opposite each other. A first coupling prism is optically coupled to the first prism with a partially reflective interface that directs a beam towards the second prism in a helical path. The first prism and the first coupling prism form a beamsplitter. A recirculating prism (or a reflective element) reflects the beam from the first prism into the second prism. Mirrors are positioned around the first and second prisms to permit recirculation of the beam through the first and second prisms. The beam recirculates through the first and second prisms using two or more helical paths. The pulse stretcher can be incorporated into a lithographic system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.