Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
US7084970B2 · kind B2 · utility
19Cited by
23References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 2004 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Feb 24, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.