Sample orientation system and method
US7084978B1 · kind B1 · utility
8Cited by
13References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 8, 2005 |
| Grant date | Aug 1, 2006 |
| Priority date | — |
| Expiry date | Jul 8, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/01
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are systems and methodology for orienting the vertical position, and tilt, of samples, as applied in ellipsometer and the like systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.