Low-deformation support device of an optical element

US7085080B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Dirk Schaffer · Jena, DE
• Andreas Wurmbrand · Aalen, DE
• Thomas Schletterer · Oberkochen, DE

Key dates

• Filing date: Dec 3, 2004
• Grant date: Aug 1, 2006
• Expiry date: Dec 3, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In a low-deformation support device of an optical element (8, 24), in particular an end plate (14) of a projection objective (7) of a projection exposure machine (3) for microlithography for the purpose of producing semiconductor components, in a mount (13), the optical element (8, 14) is connected to the mount (13) at least partly via a bonded connection. The bonded connection is located between the adjacent circumferential wails of mount (13) and optical element (14). The mount (13) is provided with at least three bearing elements (20) which are distributed over the circumference and by means of which the optical element (8, 14) is laterally and axially supported. The mount (13) has spring elements (15) which are constructed monolithically with the bearing elements (20) and are soft in axial and radial directions.