Optimized temperature controller for cold mass introduction
US7087443B2 · kind B2 · utility
5Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2003 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Sep 22, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67754
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for minimizing thermal reactor temperature overshoot and stabilization during a boat push. In one embodiment, the setpoint temperatures are reduced to a minimum value. As the temperature in the thermal reactor begins to increase, the setpoint temperatures are ramped back to the original setpoint temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.