Thin film thickness measurement using multichannel infrared sensor
US7088456B2 · kind B2 · utility
3Cited by
6References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 24, 2004 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Aug 26, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0616
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for analyzing the characteristics of a thin film is provided. The current invention extends the capability of IR sensors to measure thin films through configuring a plurality of detection channels with appropriately chosen filters. With the multichannel infrared sensor, the characteristic signature of interference fringes can be detected simultaneously with, or instead, of absorption-based measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.