Method and apparatus for analyzing gas flow in a gas panel
US7089134B2 · kind B2 · utility
14Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2003 |
| Grant date | Aug 8, 2006 |
| Priority date | — |
| Expiry date | Jun 28, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B21/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
One embodiment of the present invention is a method for analyzing gas flow in a gas transmission unit of a gas panel that includes: (a) monitoring a measure of gas flow output from a mass flow controller included in the gas transmission unit; (b) monitoring a measure of gas pressure output from a pressure regulator included in the gas transmission unit; and (c) analyzing the measure of gas flow and the measure of gas pressure to determine whether gas flow is stable in the gas transmission unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.