Temperature gauge and ceramic susceptor in which it is utilized
US7090394B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2003 |
| Grant date | Aug 15, 2006 |
| Priority date | — |
| Expiry date | Oct 6, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K1/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Temperature gauge, and ceramic susceptors and semiconductor manufacturing equipment utilizing the temperature gauge, in which the thermocouple may be easily replaced even if damaged, and in which heat from the temperature-gauging site is readily transmitted to the temperature-gauging contact, shortening time until the measurement temperature stabilizes. A temperature-gauging contact (12) in the tip of the thermocouple contacts, in an exposed-as-it-is state, a temperature-gauging site on a ceramic susceptor (1), and by means of a circular cylindrical-shaped retaining member (11) screwed into female threads in the ceramic susceptor (1) is detachably pressed upon and retained against the ceramic susceptor. Thermocouple lead lines (13), passing through a through-hole (14) in the retaining member (11), stretch from one end face to the other end face thereof. The retaining member may be provided with a flange having threaded holes and screwlocked into female screws in the ceramic susceptor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.