Ultrasonic assisted etch using corrosive liquids
US7091132B2 · kind B2 · utility
13Cited by
50References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2003 |
| Grant date | Aug 15, 2006 |
| Priority date | — |
| Expiry date | Nov 23, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67057
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An ultrasonic etching apparatus for chemically-etching a workpiece is disclosed. The apparatus includes an outer tank at least partially filled with an aqueous solution, an inner tank at least partially disposed within the outer tank and in contact with aqueous solution, the inner tank at least partially filled with an etching solution, a lid engaged with the mouth of said inner tank; and an ultrasonic transducer coupled to the outer tank to impart ultrasonic energy to the etching solution in said inner tank. Also disclosed are methods of using the apparatus to etch workpieces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.