Inspection system for active matrix panel, inspection method for active matrix panel and manufacturing method for active matrix OLED panel
US7091738B2 · kind B2 · utility
7Cited by
11References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 29, 2004 |
| Grant date | Aug 15, 2006 |
| Priority date | — |
| Expiry date | Aug 19, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G3/3225
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An inspection system for inspecting characteristics of an active matrix panel before formation of OLEDs includes: a roller contact probe having a conductive material on at least a surface thereof and sequentially contacting pixel electrodes formed on the active matrix panel while rotating; probe control circuits having capability to apply a voltage necessary for measurement to TFT arrays including pixel electrodes with which the roller contact probe is in contact; and a computer measuring currents flowing through the TFT arrays to which a voltage is applied and statistically processing the measurement results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.