Architecture of a reflective spatial light modulator
US7092140B2 · kind B2 · utility
9Cited by
39References
21Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 13, 2004 |
| Grant date | Aug 15, 2006 |
| Priority date | — |
| Expiry date | Mar 2, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.