Micromirror array device and a method for making the same
US7092143B2 · kind B2 · utility
5Cited by
76References
79Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2004 |
| Grant date | Aug 15, 2006 |
| Priority date | — |
| Expiry date | Nov 26, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The spatial light modulator of the present invention comprises an array of micromirrors, each of which has a reflective deflectable mirror plate. A set of posts are provided for holding the mirror plates on a substrate, but not all micromirrors of the micromirror array have posts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.