Near-field X-ray fluorescence microprobe
US7095822B1 · kind B1 · utility
48Cited by
5References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 28, 2005 |
| Grant date | Aug 22, 2006 |
| Priority date | — |
| Expiry date | Jul 28, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/95
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.