Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means
US7099006B1 · kind B1 · utility
3Cited by
41References
23Claims
0Family size
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Key dates
| Filing date | Jul 7, 2003 |
| Grant date | Aug 29, 2006 |
| Priority date | — |
| Expiry date | Sep 1, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromagnetic beam chromatic shifting and directing means for use in reflectively directing a spectroscopic beam of electromagnetic radiation while de-emphasizing visual wavelength intensity and simultaneously emphasizing both IR and UV wavelength intensities, applied in ellipsometer or polarimeter and the like systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.