Patent · US Expired

Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement

US7100446B1 · kind B1 · utility

39Cited by

5References

28Claims

0Family size

Assignee

The Regents of the University of California · US

Inventors

Cenk Acar · Laguna Beach, US
Andrei M. Shkel · Irvine, US

Key dates

Filing date	Jul 20, 2004
Grant date	Sep 5, 2006
Priority date	—
Expiry date	Jul 20, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5719
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromachined z-axis rate gyroscope with multidirectional drive-mode has an increased drive-mode bandwidth for relaxing mode-matching requirement in which the drive and sense modes are completely decoupled. By utilizing multiple drive-mode oscillators with incrementally spaced resonance frequencies, wide-bandwidth response is achieved in the drive-mode, leading to reduced sensitivity to structural and thermal parameter fluctuations. Quadrature error and zero-rate-output are also minimized, due to the enhanced decoupling of multi-directional linear drive-mode and the torsional sense-mode. Bulk-micromachined prototypes have been fabricated in a one-mask SOI-based process, and is experimentally characterized.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.