Supercritical carbon dioxide-based cleaning of metal lines
US7101443B2 · kind B2 · utility
0Cited by
8References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 29, 2003 |
| Grant date | Sep 5, 2006 |
| Priority date | — |
| Expiry date | Oct 16, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D7/30
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Supercritical carbon dioxide may be utilized to clean metal lines (e.g. copper, cobalt). The supercritical carbon dioxide cleans may include hydrogen gas in one embodiment, hydrofluoric acid in another embodiment, and hexafluoroacetyl acetone as a metal-binding ligand in another embodiment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.