Flash lamp annealing apparatus to generate electromagnetic radiation having selective wavelengths
US7102141B2 · kind B2 · utility
11Cited by
3References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2004 |
| Grant date | Sep 5, 2006 |
| Priority date | — |
| Expiry date | Nov 13, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Flash lamp apparatuses that generate electromagnetic radiation with wavelengths greater than and/or less than a defined range of wavelengths are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.