Inspection device and inspection method for active matrix panel, and manufacturing method for active matrix organic light emitting diode panel
US7106089B2 · kind B2 · utility
71Cited by
4References
14Claims
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Key dates
| Filing date | May 18, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | May 18, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2330/10
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An inspection method includes an array process of forming a TFT array on a substrate to fabricate an active matrix panel, an inspection process of carrying out a performance test on the fabricated active matrix panel, and a cell process of mounting an OLED on the active matrix panel after the inspection process. In the inspection process, variation in parasitic capacitance through a pixel electrode is measured when driving TFTs constituting the active matrix fabricated in the array process are turned on and when the driving TFTs are turned off, and open/short defects in the driving TFTs are thereby inspected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.