Measuring device and measuring method
US7106452B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 23, 2001 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Dec 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A wavefront measuring device is disclosed which is capable of measuring an average wavefront and the retardation of a lens including birefringence. The measuring device includes a light source for emitting a linearly polarized light; a polarization orientation setting member for switching the polarization orientation of the light flux from the light source between at least two orientations; a light synthesizing member for synthesizing the light flux after passing the light fluxes through an object to be measured and a reference surface; an analyzer for switching the polarization orientation so as to pass only the same polarized component as the polarized light incident on the object to be measured; an image pickup member for detecting interference information of the light flux obtained through the analyzer; and a calculating section for calculating the average wavefront and/or the retardation of the object to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.