Profiling complex surface structures using scanning interferometry
US7106454B2 · kind B2 · utility
60Cited by
28References
71Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 8, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Feb 10, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.