System for controlling fluid flow
US7107128B2 · kind B2 · utility
13Cited by
5References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2004 |
| Grant date | Sep 12, 2006 |
| Priority date | — |
| Expiry date | Jul 19, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0989
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.