Method and apparatus for the actuation of the cantilever of a probe-based instrument
US7107825B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2003 |
| Grant date | Sep 19, 2006 |
| Priority date | — |
| Expiry date | Aug 28, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromagnetic drive causes a cantilever of a probe-based instrument to deform flexurally by transmitting a high frequency AC signal through an electromagnetic actuator located in the vicinity of the cantilever. The AC signal preferably is an RF carrier signal having a frequency that is substantially higher than the resonant frequency of the cantilever. The carrier signal may, if desired, be modulated with a lower frequency modulation signal to induce the cantilever to oscillate, preferably at resonance. Alternatively, the carrier signal may be transmitted to the electromagnetic actuator without being modulated in order to deflect the cantilever quasi-statically. Cantilever response can then be monitored either directly in response to the imposition of the electromagnetically induced deformation of the cantilever in response to probe/sample interaction to obtain measurements regarding characteristics of the sample, the environment, and/or the cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.