Wire bonder with a device for determining the vectorial distance between the capillary and the image recognition system and method
US7108167B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2004 |
| Grant date | Sep 19, 2006 |
| Priority date | — |
| Expiry date | Jul 14, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19043
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A Wire Bonder comprises a bondhead that can be moved in a horizontal plane that has a capillary clamped to a horn and parts of an image recognition system. The tip of the capillary and the optical axis of the image recognition system are separated by a vectorial distance D. The Wire Bonder has a device with a body with an optical marking and with two stop faces that enable the vectorial distance D to be recalibrated at any time. The control program of the Wire Bonder is set up on the one hand to move the capillary towards the first stop face and to determine a first co-ordinate xC of the position of the bondhead as soon as the capillary touches the first stop face and then to move the capillary towards the second stop face and to determine a second co-ordinate yC of the position of the bondhead as soon as the capillary touches the second stop face. The control program is further set up to determine the co-ordinates (xA, yA) of the bondhead at which the optical axis of the image recognition system passes through the optical marking at a predetermined point. And the control program is set up to recalibrate the vectorial distance D under consideration of the acquired co-ordinates xA, …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.