Method for making an integrated circuit comprising a waveguide having an energy band engineered superlattice
US7109052B2 · kind B2 · utility
107Cited by
33References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2004 |
| Grant date | Sep 19, 2006 |
| Priority date | — |
| Expiry date | Sep 9, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/038
Abstract
A method for making an integrated circuit may include forming at least one active optical device and a waveguide coupled thereto. The waveguide may include a superlattice including a plurality of stacked groups of layers. Each group of layers of the superlattice may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and an energy band-modifying layer thereon. The energy-band modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.