Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device
US7113263B2 · kind B2 · utility
4Cited by
17References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2004 |
| Grant date | Sep 26, 2006 |
| Priority date | — |
| Expiry date | Sep 28, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70891
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A supporting structure for supporting an optical element includes a first supporting member for supporting the optical element, and a second supporting member for supporting the first supporting member. The value of a thermal expansion coefficient of the first supporting member is between those of the optical element and the second supporting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.