Shaped non-contact capacitive displacement sensors for measuring shaped targets
US7114399B2 · kind B2 · utility
7Cited by
6References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 4, 2004 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Jun 19, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved non-contact capacitive displacement sensor that may be employed for accurately measuring small distances between the sensor and shaped targets. The non-contact capacitive displacement sensor includes a probe having a sensor element and a guard element. The guard element substantially surrounds the sensor element. At least the sensor element has a shape that substantially matches the shape of a target element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.