Probe mounting device for a scanning probe microscope
US7114405B2 · kind B2 · utility
6Cited by
12References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2002 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Apr 5, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a probe (207) mounting device for a scanning probe microscope, especially a scanning force microscope, comprising a retaining member (200) for installation in a measuring assembly of a scanning probe microscope. The probe (207) is detachably mounted on the retaining member (200) by means of a clamping member (201), the clamping member being secured in self-locking fashion to the retaining member (200).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.