Patent · US Expired

Probe mounting device for a scanning probe microscope

US7114405B2 · kind B2 · utility

6Cited by
12References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 24, 2002
Grant dateOct 3, 2006
Priority date
Expiry dateApr 5, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q70/02
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The invention relates to a probe (207) mounting device for a scanning probe microscope, especially a scanning force microscope, comprising a retaining member (200) for installation in a measuring assembly of a scanning probe microscope. The probe (207) is detachably mounted on the retaining member (200) by means of a clamping member (201), the clamping member being secured in self-locking fashion to the retaining member (200).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.