Patent · US Expired

Semiconductor device

US7115966B2 · kind B2 · utility

250Cited by
13References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 28, 2003
Grant dateOct 3, 2006
Priority date
Expiry dateSep 25, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

On a semiconductor substrate a silicon oxide film is formed and provided with a recess. In the recess a reflector layer of copper is disposed as a blocking layer with a barrier metal posed therebetween. The reflector layer of copper is covered with a silicon oxide film and thereon a fuse region provided with a plurality of fuses is provided. The reflector layer of copper has a plane of reflection recessed downward to reflect a laser beam. The reflector layer of copper is arranged to overlap substantially the entirety of the fuse region, as seen in a plane. A laser beam radiated to blow the fuse can have a reduced effect on a vicinity of the fuse region. A semiconductor device reduced in size can be obtained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.