Micro actuator and optical switch using the actuator
US7116192B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2004 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Sep 22, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3596
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The movable part is constructed from a bridge part 13 with a cantilever structure in which the fixed end is fastened via a leg part 12. The bridge part 13 has two bridge constituent parts 14 and 15 that are connected in series between the fixed end and the free end. The bridge constituent part 14 on the side of the fixed end is a plate spring part. The bridge constituent part 15 on the side of the free end is a rigid part that possesses rigidity. The bridge constituent part 14 is bent toward the opposite side from the substrate 11 in a state in which the bridge part 13 receives no force. The mirror 2 is disposed on the free end side of the bridge constituent part 15. As a result, a microactuator can be obtained which can be operated by a small driving force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.