Optical element holder, exposure apparatus, and device fabricating method
US7116501B2 · kind B2 · utility
4Cited by
14References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 5, 2005 |
| Grant date | Oct 3, 2006 |
| Priority date | — |
| Expiry date | Oct 5, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.