Reflective spatial light modulator
US7118234B2 · kind B2 · utility
9Cited by
48References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2004 |
| Grant date | Oct 10, 2006 |
| Priority date | — |
| Expiry date | Jan 13, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.