Patent · US Expired

Method of manufacturing an optical element

US7118449B1 · kind B1 · utility

11Cited by

5References

19Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Udo Dinger · Oberkochen, DE
Frank Eisert · Aalen, DE
Siegfried Stacklies · Aalen, DE
Martin Weiser · Sinsheim, DE
Guenther Seitz · Löwenstein, DE

Key dates

Filing date	Sep 20, 2004
Grant date	Oct 10, 2006
Priority date	—
Expiry date	Jan 7, 2025

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B51/00
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A method of manufacturing an optical element having an optical surface extending close to a periphery of a substrate comprises: providing a substrate having a main surface extending beyond a periphery of the optical surface and also performing a polishing of the optical surface in regions of the main surface extending beyond the optical surface. Thereafter, material of the substrate carrying a portion of the surface extending beyond the optical surface is removed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.