Method and apparatus for controlling nucleation in self-assembled films
US7118784B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 27, 2005 |
| Grant date | Oct 10, 2006 |
| Priority date | — |
| Expiry date | Jun 27, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/17
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of forming a self-assembled film with periodic nanometer dimension features (e.g., holes) on a substrate includes the steps of providing film precursors on the substrate, wherein the film precursors are maintained in an amorphous state. Where the film precursors are block copolymers, a heating member is provided. The substrate and the heating member are then moved relative to one another so as to raise the temperature of a portion of the film precursor on the substrate above its glass transition temperature. Relative movement between the substrate and heating member continues until a self-assembled crystalline film is formed over the surface of the substrate. In an alternative embodiment, a pH dispensing member is provided to dispense a pH adjusting agent onto the substrate that promotes self-assembly of a crystalline film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.