Ion detector for ion beam applications
US7119333B2 · kind B2 · utility
21Cited by
9References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 10, 2004 |
| Grant date | Oct 10, 2006 |
| Priority date | — |
| Expiry date | Nov 10, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3174
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Detection of weak ion currents scattered from a sample by an ion beam is improved by the use of a multiplier system in which a conversion electrode converts incident ions to a number of secondary electrons multiplied by a multiplication factor, the secondary electrons being attracted to an electron detector by an appropriate bias. In one version, the detector is a two stage system, in which the secondary electrons strike a scintillator that emits photons that are detected in a photon detector such as a photomultiplier or a CCD.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.