Device for liquid treatment of disk-shaped objects
US7122084B2 · kind B2 · utility
6Cited by
13References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 18, 2003 |
| Grant date | Oct 17, 2006 |
| Priority date | — |
| Expiry date | Jun 18, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67023
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device is suggested which includes a carrier (1) for receiving the disk-shaped object (10), a liquid supply device (17) for applying liquid onto a disk-shaped object (10) located on the carrier (1), and a liquid catch ring (2), which is positioned essentially coaxially around the carrier (1) and is rotatable around the axis of the liquid catch ring (2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.