Patent · US Expired

Trench-gate semiconductor devices

US7122860B2 · kind B2 · utility

23Cited by
3References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 21, 2003
Grant dateOct 17, 2006
Priority date
Expiry dateJul 8, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/511
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A trench-gate semiconductor device, for example a MOSFET or IGBT, includes a semiconductor body (20) having a drain region (4) comprising a drain drift region (4a) and a drain contact region (4b). An insulated field plate (24) is included in the trench (10) between the gate (8) and the drain contact region (4b), wherein the field plate (24) is for connection to a bias potential greater than the gate potential and near to the bulk breakdown voltage of the drain drift region (4a). The field plate (24) causes the potential drop across the drain drift region (4a) to be spread considerably more evenly, particularly at applied voltages greater than the bulk breakdown voltage, thereby substantially increasing the breakdown voltage of the device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.