Method for producing an optical emission module having at least two vertically emitting lasers
US7125733B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 6, 2004 |
| Grant date | Oct 24, 2006 |
| Priority date | — |
| Expiry date | Jan 26, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/2081
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for producing an emission module having at least two vertically emitting lasers in which an optically active laser layer is arranged on a substrate and at least one upper covering layer is arranged on said laser layer. In a first etching step, upper mesa regions are formed by etching the upper covering layer, wherein the etching depth of the first etching step is chosen such that the first etching step is ended above the optically active laser layer, and the first etching step is carried out such that the resulting distance between adjacent upper mesa regions is so small that the radiation generated by the finished lasers can be coupled directly into a single optical waveguide. In a second etching step, the optically active layer is severed to form lower mesa regions, the second etching step being a wet-chemical or dry-chemical etching step with a predominantly chemical etching component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.