Optical device having micro lens array and method for manufacturing the same
US7129176B2 · kind B2 · utility
5Cited by
12References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 20, 2004 |
| Grant date | Oct 31, 2006 |
| Priority date | — |
| Expiry date | Jun 16, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8063
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical device includes a semiconductor substrate and an optical part having a plurality of columnar members disposed on the substrate. Each columnar member is disposed in a standing manner and adhered each other so that the optical part is provided. The optical part is integrated with the substrate. This optical part has high design freedom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.