Apparatus for detecting defect in circuit pattern and defect detecting system having the same
US7129719B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2004 |
| Grant date | Oct 31, 2006 |
| Priority date | — |
| Expiry date | Jun 12, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2896
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an apparatus for detecting a defect of a circuit pattern which includes a resonator, a first power supply unit connected to one end of the resonator to apply power to the resonator, a probe connected to the other end of the resonator to contact one end of the circuit pattern, a second power supply unit connected to the other end of the circuit pattern to apply a voltage thereto, and a detection portion connected between the resonator and the probe to measure a voltage generated from the circuit pattern and generate a measurement voltage, and determine presence of a defect in the circuit pattern from the measurement voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.