Apparatus and method for anchoring micromachined structures
US7134340B2 · kind B2 · utility
7Cited by
8References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 2005 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | May 16, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/1293
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Micromachined structures, such as fixed drive or sensing fingers of an inertial sensor, are anchored to a substrate using multiple anchors or elongated anchors in order to reduce the bending or twisting of the micromachined structure about the anchor point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.