Device for handling substrates inside and outside a clean room
US7134825B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2000 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Apr 13, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room conditions can be removed from or placed in said box (13); and with a first handling device (51), by which means the substrates (11) can be placed in or removed from the cassette (12). According to the invention, a storage area (20) for a plurality of cassette boxes (13) is positioned on or above the clean room (15) and the locking transfer device (17) is provided between the storage area (20) and the clean room (15), so that various work and production steps can be combined in such a way as to save space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.