Method and system for producing signals to test semiconductor devices
US7135881B2 · kind B2 · utility
2Cited by
15References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2004 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Dec 21, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31924
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of and system for producing signals to test semiconductor devices includes a pin electronic (PE) stage for providing a parametric measurement unit (PMU) current test signal to a semiconductor device under test. The PE stage also senses a response from the semiconductor device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.