Apparatus and method for calibration of mass flow controller
US7136767B2 · kind B2 · utility
42Cited by
24References
47Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2002 |
| Grant date | Nov 14, 2006 |
| Priority date | — |
| Expiry date | Jun 24, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.