High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
US7137309B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2005 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | Oct 11, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held by a vacuum contact is transported on air cushions from the up-web air table to the central inspection/repair section. Vacuum nozzles integrated with porous medium pads precisely control the height of the flexible media above the central section during inspection or repair. Embodiments includes structures in which the media is either stationary or moving during inspection/repair. A first media can be loaded/unloaded while a second media is undergoing inspection or repair in a pipelined operational mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.