Method and apparatus for protecting surfaces of optical components
US7138640B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2003 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | May 7, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/151
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that transports contaminants away from the optical surfaces of the optical components. Another aspect of the invention relates to a transparent cover that physically blocks contaminants from reaching the optical surfaces of the optical components. Yet another aspect of the invention relates to a combination of the gas purge system and the transparent cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.