Apparatus for adjustment of partial coherence of light energy in an imaging system
US7139135B2 · kind B2 · utility
3Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2003 |
| Grant date | Nov 21, 2006 |
| Priority date | — |
| Expiry date | Jun 11, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70166
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.