Methods and apparatus for a MEMS varactor
US7141989B1 · kind B1 · utility
24Cited by
6References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 10, 2006 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Apr 10, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/38
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro-electro mechanical system (MEMS) variable capacitor (varactor) generally includes a substrate (102), a first capacitive plate (112) formed on the substrate, a flexible structure (150) coupled to the substrate, a second capacitive plate (116) and a first electrode (122) formed on the flexible structure; a package seal (104) coupled to the substrate and having a second electrode (106) formed thereon, wherein the distance between the first capacitive plate and the second capacitive plate (and hence, the capacitance of the structure) is responsive to a bias voltage applied to the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.