Device including contacts
US7142282B2 · kind B2 · utility
8Cited by
13References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 17, 2003 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Oct 17, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70433
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device that includes contacts. In one implementation, a device includes a substantially arbitrary arrangement of contacts. The contacts in the device are defined with a definition characteristic of interference lithography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.