Method and structure for reducing parasitic influences of deflection devices on spatial light modulators
US7142349B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 7, 2005 |
| Grant date | Nov 28, 2006 |
| Priority date | — |
| Expiry date | Mar 27, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator is provided. The spatial light modulator includes a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals, and a bias grid coupled to the first substrate and electrically isolated from the plurality of electrodes. The spatial light modulator also includes a mirror plate electrically coupled to the bias grid and adapted to rotate from a first orientation to a second orientation in response to the control signals received by the plurality of electrodes. The spatial light modulator further includes a landing post support structure coupled to the first substrate and electrically coupled to the bias grid and a landing post coupled to the landing post support structure. The landing post is electrically coupled to the bias grid and adapted to make contact with the mirror plate positioned at the first orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.